Optimization of thermal distribution in ceramics and LTCC structures applied to sensor elements

Microelectronics International

Volumn 15, Issue 2, 1998, Pages 34-38

  Bauer, Reinhard ^a   Golonka, Leszek J ^b   Kirchner, Torsten ^c   Nitsch, Karol ^b   Thust, Heiko ^c  

^a DRESDEN UNIVERSITY OF TECHNOLOGY   (Germany)

^b WROCLAW UNIVERSITY OF TECHNOLOGY   (Poland)

^c ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 13144266775     PISSN: 13565362     EISSN: None     Source Type: Journal    
DOI: 10.1108/13565369810215618     Document Type: Article

References (6)

1. Bauer, R., Herenz, A. and Wolter, K-J. (1997), "Characterization of ceramic devices by ultrasonic microscopy", 2nd International Acoustic Micro Imaging Symposium.
2. Bauer, R., Katzung, A. and Luniak, M. (1996a), "Low temperature cofiring ceramic-multilayer-technology - some aspects of materials and technology applications", XXISHM Conference, Poland.
3. Bauer, R., Katzung, A., Luniak, M. and Jahne, G. (1996b), "Strukturierung von low temperature cofiring ceramic materialien mittels laser", Internationale Mittweidaer Fachtagung HTW Mittweida.
4. Dziedzic, A., Golonka, L.J. and Licznerski, B.W. (1994), "Heaters for gas sensors from thick conductive or resistive films", Sensors and Actors B, 18-19.
5. Golonka, L.J., Kirchner, T., Licznerski, B.W. and Thust, K.H. (1996), "Application of green tape to thick film sensors", Proceedings of IVth Conference of Optoelectronic and Electronic Sensors COE '96, Szczyrk, Poland.
6. Kirchner, T. (1996), "Thermal optimization of heaters in LTCC for gas sensors with AutoTherm", Annual International Mentor Graphics Users' Group Conference, Portland, OR.