Orientation dependence of fracture toughness measured by indentation methods and its relation to surface energy in single crystal silicon

International Journal of Fracture

Volumn 139, Issue 3-4, 2006, Pages 383-394

  Tanaka, Masaki ^a,c   Higashida, K ^a   Nakashima, H ^a   Takagi, H ^b   Fujiwara, M ^b  

^a KYUSHU UNIVERSITY   (Japan)

^b NIHON UNIVERSITY   (Japan)

^c UNIVERSITY OF OXFORD   (United Kingdom)

Author keywords

Fracture toughness; Indentation; Silicon single crystal; Surface energy

Indexed keywords

CRYSTALLOGRAPHY; FRACTURE TOUGHNESS; INDENTATION; INTERFACIAL ENERGY; MOLECULAR DYNAMICS; SINGLE CRYSTALS;

CRYSTALLOGRAPHIC PLANES; INDENTATION METHODS; PREFERENTIAL FRACTURE; SILICON SINGLE CRYSTAL;

SILICON;

EID: 33749329263     PISSN: 03769429     EISSN: 15732673     Source Type: Journal    
DOI: 10.1007/s10704-006-0021-7     Document Type: Conference Paper

References (21)

1. C.P. Chen M.L. Leipold 1980 Fracture toughness of silicon American Ceramic Society Bulletin 59 469-472
2. R.F. Cook G.M. Pharr 1990 Direct observation and analysis of indentation cracking in glasses and ceramics Journal of the American Ceramic Society 73 787-817 10.1111/j.1151-2916.1990.tb05119.x
3. R.W. Davidge 1979 Mechanical Behaviour of Ceramics Cambridge University Press Cambridge 32
4. F. Ebrahimi L. Kalwani 1999 Fracture anisotropy in silicon single crystal Materials Science Engineering. A 268 116-126 10.1016/ S0921-5093(99)00077-5
5. M. Esashi 1996 Silicon micromachining for integrated microsystems Vacuum 47 469-474 10.1016/0042-207X(96)00003-6
6. M. Fujiwara 2002 Characterization of mechanical properties in materials through instrumented indentation Journal of the Japan Institute Light Metals 52 282-290 1898144
7. J.J. Gilman 1960 Direct measurements of the surface energy of crystals Journal of Applied Physics 31 2208-2218 10.1063/1.1735524
8. Gilman J.J. (1920). Fracture, The Technology Press of Massachusetts Institute of Technology. (1959) pp. 202.
9. A.A. Griffith 1920 The phenomena of rupture and flow in solids Philosophical Transactions of the Royal Society of London Series A 221 163-198 1921RSPTA.221..163G
10. K. Hayashi S. Tsujimoto Y. Okamoto T. Nishikawa 1991 Fracture toughness of single crystal silicon Journal of the Society of Material Science Japan 40 405-410
11. K. Higashida M. Tanaka R. Onodera 2005 Materials Science Forum 475-479 4043-4046
12. J.P. Hirth J. Lothe 1992 Theory of Dislocations 2 Krieger Publishing Company Malabar Florid 836pp.
13. A. Kelly N.H. Macmillan 1986 Strong Solids 3 Oxford Science Oxford 382pp.
14. G. Michot 1988 Fundamentals of silicon fracture Crystal Properties & Preparation 17-18 55-98
15. T. Mizuguchi K. Ikeda F. Yoahida H. Nakashima H. Abe 2004 Evaluation of crystal orientation dependence of surface energy in silicon Journal of the Japan Institute of Metals 68 86-89 10.2320/jinstmet.68.86
16. E. Orowan 1934 Die mechanischen Festigkeitseigenschaften und die Realstructur der Kristalle Z. Kristallogr. (A) 89 327-434
17. J. Samuels S.G. Roberts 1989 The brittle-ductile transition in silicon. I. experiments Proceedings of the Royal Society of London A 421 1-23 1989RSPSA.421....1S
18. M. Tanaka K. Higashida H. Nakashima H. Takagi M. Fujiwara 2003 Fracture toughness evaluated by indentation methods and its relation to surface energy in silicon single crystals Materials Transactions 44 681-684 10.2320/matertrans.44.681
19. J. Tersoff 1989 Modeling solid-state chemistry: Interatomic potentials for multicomponent systems Physical Review B 39 5566-5568 10.1103/ PhysRevB.39.5566 1989PhRvB..39.5566T
20. I. Yonenaga 1996 Upper yield stress of Si crystals at high temperatures Journal of Electrochemical Society 143 L176-L178 10.1149/1.1837021
21. F. Zwicky 1923 Die Reißfestigkeit von Steinsalz Phys. Z 24 131-137