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Volumn 331, Issue 2, 2009, Pages 371-378
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Adhesion between highly rough alumina surfaces: An atomic force microscope study
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Author keywords
Particle adhesion; Surface roughness; Ultra cleaning
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Indexed keywords
ADHESION FORCES;
ALUMINA SUBSTRATES;
ALUMINA SURFACES;
PARTICLE ADHESION;
REACTOR WALLS;
ULTRA-CLEANING;
CORUNDUM;
FRICTION;
MICROELECTRONICS;
SURFACE CLEANING;
SURFACE PROPERTIES;
SURFACE ROUGHNESS;
ADHESION;
ALUMINUM;
SILICON NITRIDE;
ADHESION;
ARTICLE;
ATOMIC FORCE MICROSCOPY;
PARTICLE SIZE;
PRIORITY JOURNAL;
PROBABILITY;
SCANNING ELECTRON MICROSCOPY;
TOPOGRAPHY;
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EID: 58649091301
PISSN: 00219797
EISSN: None
Source Type: Journal
DOI: 10.1016/j.jcis.2008.11.050 Document Type: Article |
Times cited : (22)
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References (39)
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