Growth of and oxygen-flow influence on ZnO layers grown by using rf magnetron sputtering

Journal of the Korean Physical Society

Volumn 53, Issue 6, 2008, Pages 3250-3254

  Park, D S ^a   Yu, J H ^a   Kim, J H ^a   Jeong, T S ^a   Youn, C J ^a   Hong, K J ^b  

^a Chonbuk National University   (South Korea)

^b Chosun University   (South Korea)

Author keywords

Characterization; Growth; Oxygen influence; RF magnetron sputtering; ZnO

Indexed keywords

EID: 58249097049     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: 10.3938/jkps.53.3250     Document Type: Article

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