Transparent conducting molybdenum-doped zinc oxide films deposited by RF magnetron sputtering

Applied Surface Science

Volumn 253, Issue 6, 2007, Pages 3345-3348

  Xiu, Xianwu ^a   Pang, Zhiyong ^a   Lv, Maoshui ^a   Dai, Ying ^a   Ye, Lina ^a   Han, Shenghao ^a,b  

^a SHANDONG UNIVERSITY   (China)

^b SHANDONG UNIVERSITY   (China)

Author keywords

Magnetron sputtering; Molybdenum oxide; Transparent conducting oxides; Zinc oxide

Indexed keywords

CONCENTRATION (PROCESS); CRYSTAL STRUCTURE; DOPING (ADDITIVES); MAGNETRON SPUTTERING; SUBSTRATES; ZINC OXIDE;

MOLYBDENUM OXIDE; TRANSPARENT CONDUCTING OXIDES;

THIN FILMS;

EID: 33845721794     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2006.07.024     Document Type: Article

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