A self-priming, high performance, check valve diaphragm micropump made from SOI wafers

Journal of Micromechanics and Microengineering

Volumn 18, Issue 12, 2008, Pages

  Kang, Jianke ^a,c   Mantese, Joseph V ^b   Auner, Gregory W ^a  

^a Wayne State University   (United States)

^b UNITED TECHNOLOGIES RESEARCH CENTER   (United States)

^c SUSS MicroTec Lithography GmbH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIAPHRAGMS; FABRICATION; HIGH PERFORMANCE LIQUID CHROMATOGRAPHY; PUMPS; SEMICONDUCTING SILICON COMPOUNDS; VALVES (MECHANICAL); WAFER BONDING;

CHECK VALVES; CORE COMPONENTS; DEVICE LAYERS; FILLING PROCESSES; MICROPUMP; POWER CONSUMPTIONS; PUMPING PRESSURES; PUMPING RATES; SILICON ON INSULATORS; SOI WAFERS;

SILICON WAFERS;

EID: 58149336807     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/12/125021     Document Type: Article

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