An electrohydrodynamic polarization micropump for electronic cooling

Journal of Microelectromechanical Systems

Volumn 10, Issue 1, 2001, Pages 98-106

  Darabi, J ^a,b   Ohadi, M M ^b   DeVoe, D ^a,b  

^a IEEE   (United States)

^b UNIVERSITY OF MARYLAND   (United States)

Author keywords

Electrohydrodynamic (EHD); Electronic cooling; MEMS; Micropump; Polarization

Indexed keywords

ELECTRONIC COOLING; MICROPUMPS;

COOLING; ELECTRODES; ELECTROHYDRODYNAMICS; HEAT TRANSFER COEFFICIENTS; MICROELECTRONICS; POLARIZATION; SENSORS; THIN FILMS; VLSI CIRCUITS;

MICROELECTROMECHANICAL DEVICES;

EID: 0035278846     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.911097     Document Type: Article

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11. Describing the uncertainties in experimental results