Geometry transformation and alterations of periodically patterned Si nanotemplates by dry oxidation

Nanotechnology

Volumn 20, Issue 1, 2009, Pages

  Park, Jeongwon ^a   Chen, Li Han ^a   Hong, Daehoon ^a   Choi, Chulmin ^a   Loya, Mariana ^a   Brammer, Karla ^a   Bandaru, Prab ^a   Jin, Sungho ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL MODIFICATION; OXIDATION; OXYGEN; SEMICONDUCTING SILICON COMPOUNDS; SILICON; SURFACE CHEMISTRY; SURFACE TENSION;

CHEMICAL ETCHINGS; CIRCULAR HOLES; DEEP ULTRAVIOLET LITHOGRAPHIES; DRY OXIDATIONS; DRY OXYGENS; GEOMETRY CONSTRAINTS; GEOMETRY TRANSFORMATIONS; NANOSCALE PATTERNS; NANOTEMPLATES; OXIDE REMOVALS; SQUARE SHAPES; SURFACE ENERGIES;

SILICON WAFERS;

NANOMATERIAL; OXYGEN; SILICON;

ANALYTIC METHOD; ARTICLE; DEEP ULTRAVIOLET LITHOGRAPHY; GEOMETRY; NANOANALYSIS; OXIDATION; PARTICLE SIZE; PRIORITY JOURNAL;

EID: 58149263202     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/20/1/015303     Document Type: Article

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