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Volumn 26, Issue 6, 2008, Pages 775-777
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In situ photoemission study of interface and film formation during epitaxial growth of Er2O3 film on Si(001) substrate
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Author keywords
high oxides; rare earths; surface and interface chemistry
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Indexed keywords
BINDING ENERGY;
CATALYTIC OXIDATION;
EMISSION SPECTROSCOPY;
EPITAXIAL GROWTH;
ERBIUM;
GROWTH (MATERIALS);
MOLECULAR BEAM EPITAXY;
PHOTOELECTRICITY;
PHOTOEMISSION;
RARE EARTH ELEMENTS;
RARE EARTHS;
SEMICONDUCTING SILICON COMPOUNDS;
SILICON;
SYNCHROTRON RADIATION;
FILM FORMATIONS;
FORMATION PROCESSES;
IN-SITU;
INTERFACIAL LAYERS;
INTERFACIAL STRUCTURES;
OXIDE LAYER THICKNESSES;
SI(001);
SI(001) SUBSTRATE;
SURFACE AND INTERFACE CHEMISTRY;
SYNCHROTRON RADIATION PHOTOEMISSION SPECTROSCOPIES;
FILM GROWTH;
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EID: 58149252149
PISSN: 10020721
EISSN: None
Source Type: Journal
DOI: 10.1016/S1002-0721(09)60003-X Document Type: Article |
Times cited : (2)
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References (11)
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