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Volumn 88, Issue 30-32, 2008, Pages 3461-3477
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Dislocation dynamics simulations of the relaxation of intrinsic stress in thin films
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Author keywords
Diffusion; Dislocation; Intrinsic stress; Plasticity; Size effects; Thin films
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Indexed keywords
COMPRESSIVE STRESS;
CRYSTAL GROWTH;
DIFFUSION;
DYNAMICS;
GRAIN BOUNDARIES;
GRAIN SIZE AND SHAPE;
MICROSTRUCTURE;
NUCLEATION;
PLASTICITY;
SOLIDS;
TENSILE STRESS;
CRYSTALLINE MATERIALS;
DISLOCATIONS (CRYSTALS);
GEOMETRY;
THIN FILMS;
DISCRETE DISLOCATION DYNAMICS;
DISLOCATION;
DISLOCATION DYNAMICS SIMULATIONS;
DISLOCATION NUCLEATIONS;
INTRINSIC STRESS;
RELAXATION BEHAVIORS;
SIZE EFFECTS;
SUBSTRATE SYSTEMS;
THIN FILMS;
VAPOR DEPOSITION;
DISCRETE DISLOCATION DYNAMICS;
DISLOCATION DYNAMICS SIMULATION;
DISLOCATION NUCLEATION;
FILM-SUBSTRATE SYSTEMS;
INTRINSIC STRESS;
RELAXATION BEHAVIORS;
SIZE EFFECTS;
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EID: 57849136129
PISSN: 14786435
EISSN: 14786443
Source Type: Journal
DOI: 10.1080/14786430801986647 Document Type: Article |
Times cited : (8)
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References (18)
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