Epitaxial and non-epitaxial heterogeneous integration technologies at NGST

Materials Research Society Symposium Proceedings

Volumn 1068, Issue , 2008, Pages 209-215

  Gutierrez Aitken, Augusto ^a   Chang Chien, Patty ^a   Oyama, Bert ^a   Tornquist, Kelly ^a   Thai, Khanh ^a   Scott, Dennis ^a   Sandhu, Rajinder ^a   Zhou, Joe ^a   Nam, Peter ^a   Phan, Wen ^a  

^a NORTHROP GRUMMAN CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

GALLIUM ARSENIDE; GALLIUM NITRIDE; III-V SEMICONDUCTORS; INTEGRATION; SEMICONDUCTING GALLIUM; SILICON ALLOYS; SILICON CARBIDE; SUBSTRATES;

HETEROGENEOUS INTEGRATION; MIXED SIGNAL; MODULE DESIGN; NORTHROP GRUMMAN SPACE TECHNOLOGIES; PERFORMANCE CHALLENGES; PROCESS CYCLE TIME;

GALLIUM ALLOYS;

EID: 57649093180     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-1068-c02-02     Document Type: Conference Paper

References (7)

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