Field emission from ZrC films on Si and Mo single emitters and emitter arrays

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 3, 1996, Pages 2090-2092

  Xie, Tianbao ^a   Mackie, W A ^a   Davis, P R ^a  

^a Linfield Research Institute   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0008730743     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588876     Document Type: Article

References (6)

1. W. A. Mackie, T. Xie, and P. R. Davis, J. Vac. Sci. Technol. B 13, 2459 (1995).
2. W. A. Mackie, J. L. Morissey, C. H. Hinrichs, and P. R. Davis, J. Vac. Sci. Technol. A 10, 2852 (1992).
3. Spindt-type field-emission array obtained from Capp Spindt, SRI International, Menlo Park, CA 94025.
4. Silicon tipped FEAs obtained from Chris Ball, and Dev. Palmer, MCNC, P.O. Box 12889, Research Triangle Park, NC 27709.
5. T. C. Tessner and P. R. Davis, J. Vac. Sci. Technol. A 11, 1 (1993).
6. W. A. Mackie, P. R. Davis, T. Xie, and C. H. Hinrichs, Proceeding of 1994 Tri-Service/NASA Cathode Workshop, 1994 (unpublished).