Influence of growth temperature on microstructure and mechanical properties of nanocrystalline zirconium carbide films

Thin Solid Films

Volumn 479, Issue 1-2, 2005, Pages 130-136

  Chen, Cheng Shi ^a   Liu, Chuan Pu ^a   Tsao, C Y A ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

Adhesion; Hardness; Nano crystalline; Sputtering; Zirconium carbide

Indexed keywords

ADHESION; CARBIDES; CHEMICAL VAPOR DEPOSITION; CLADDING (COATING); MECHANICAL PROPERTIES; MICROSTRUCTURE; NANOSTRUCTURED MATERIALS; SPUTTERING; ZIRCONIUM COMPOUNDS;

BOND BREAKING; MICROSTRAIN STRESS; PROJECT NUMBER; ZIRCONIUM CARBIDE FILMS;

THIN FILMS;

EID: 15344343458     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2004.11.196     Document Type: Article

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