Development of a metrological atomic force microscope for nano-scale standards calibration

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7155, Issue , 2008, Pages

  Wang, S H ^a   Xu, G ^a   Tan, S L ^a  

^a Agency for Science   (Singapore)

Author keywords

1D 2D lateral pitch gratings; Atomic force microscope; Autocollimator; Laser interferometer; Nanometrology; Nanotechnology; Step height

Indexed keywords

ABERRATIONS; ATOMIC FORCE MICROSCOPY; ATOMS; FILLERS; INTERFEROMETERS; INTERFEROMETRY; LASER DOPPLER VELOCIMETERS; LASERS; MICROSCOPES; NANOSTRUCTURED MATERIALS; PROBES; SCANNING; STANDARDIZATION;

1D/2D LATERAL PITCH GRATINGS; ATOMIC FORCE MICROSCOPE; AUTOCOLLIMATOR; LASER INTERFEROMETER; NANOMETROLOGY; STEP HEIGHT;

CRYSTAL ATOMIC STRUCTURE;

EID: 57549099245     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.814517     Document Type: Conference Paper

References (23)

1. International Technology Roadmap for Semiconductors, http://public.itrs. net as it is in December 2007.
2. G. Binng, C. F. Quate and C. Gerber, "Atomic force microscope", Phys. Rev. Lett, 56(9), 930-933 (1986).
3. Danish Micro Engineering: http://www.dme-spm.com as it is in December 2007.
4. P. Cusin, T. Sawai and S. Konishi, "Compact and precise positioner based on the inchworm principle," J. Micromech. Microeng., 10, 516-521 (2000).
5. SIOS Messtechmik GmbH, Am Vogelherd 46, D-98963 Ilmenau, Germany, http://www.sios.de as it is in December 2007.
6. Zerodur® Catalog, http://www.Schott.com/optics-devices as it is in December 2007.
7. H. -J. Büchner and G. Jäger, "A novel plane mirror interferometger without using comer cube reflectors", Meas. Sci. Tech., 17, 746-752 (2006).
8. G. Jäger, "Laser-based measurement to nanometer scale accuracy", Proc. SPIE, 4420, 193-202 (2001).
9. M. Welter, E. Manske and G Jäger, "Interferometric sensor and calibration system for high-precision applications", Proc. SPIE, 5384, 26-37(2004).
10. nd Euspen International Conference, 290-293 (2001).
11. T. Hausitte, G. Jäger, E. Manske, N. Hofmann and R. Mastylo, "Traceable nanometrology with a nanopositioning and nanomeasuring machine", International Symposium on Precision Mechanical Measurements, 2004, Beijing, China.
12. [l2] S. T. Smith and D. G. Chetwynd, Foundations of ultraprecision mechanism design (Gordon and Breach Science Publishers, Montreux, Switzerland, cl992).
13. S. H. Wang, C. J. Tay, C. Quan, H. M. Shang and Z. F. Zhao, "Laser integrated measurement of surface roughness and micro-displacement", Meas. Sci. Tech., 11(5), 454-458 (2000).
14. F. J. Giessibl, "AFM's path to atomic resolution", Materials Today, 8(5), 32-41 (2005).
15. [l5] V. A. Parsegian, Van der Waals forces: a handbook for biologist, engineers, and physicist (Cambridge University Press, New York, 2006).
16. [l6] VLSI Standards Incorporated, http://www.vlsistd.com/ as it is in December 2007.
17. ISO 5436-1. Geometrical Product Specifications (GPS) - surface texture: profile method. Measurement standards - part 1: material measures; 9-10 (2000).
18. R. K. Leach, "NanoSurf IV: traceable measurement of surface texture at the National Physical Laboratory, UK", International Journal of machine tools & manufacture, 41(13-14), 2113-2121 (2001).
19. G. L. Dai, F. Pohlenz, H. U. Danzebrink, M. Xu and K. Hasche, "Metrological large range scanning probe microscope", Rev. Sci. Instrument, 75(4), 962-969 (2004).
20. J. M. Cowley, Diffraction Physics (Amsterdam: North-Holland Pub. Co.; New York: American Elsevier, 1975).
21. G. L. Dai, L. Koenders, F. Pohlenz, T. Dziomba and H.-U. Danzebrink, "Accurate and traceable calibration of one-dimensional gratings," Meas. Sci. Tech., 16, 1241-1249 (2005).
22. J. F. Jorgensen, C. P. Jensen and J. Garnaes, "Lateral metrology using scanning probe microscopes, 2D pitch standards and image processing", Appl. Phys. A 66, 847-852 (1998).
23. J. Garnass, N. Kofod, A. Kühle, P. Besmans, and etc, "Standards for the calibration of SPMs: design-traceable calibration- application", Proc. Xth International Colloquium on Surfaces, Shaker: Aachen, 277-287 (2000).