Interferometric sensor and calibration system for high-precision applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5384, Issue , 2004, Pages 26-37

  Welter, Matthias ^a   Manske, Eberhard ^a   Jaeger, Gerd ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Angle measurement; Calibration; Interferometric sensor; Scanning probe microscope; Sub nanometre resolution

Indexed keywords

ANGLE MEASUREMENT; CALIBRATION; DATA PROCESSING; ERROR ANALYSIS; INTERFEROMETERS; SIGNAL PROCESSING; SURFACE MEASUREMENT; THERMAL EXPANSION;

INTERFEROMETRIC SENSORS; POSITIONING SYSTEMS; SCANNING PROBE MICROSCOPE (SPM); SUB-NANOMETRE RESOLUTION;

SENSORS;

EID: 8844240791     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.538913     Document Type: Conference Paper

References (6)

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