NanoSurf IV: Traceable measurement of surface texture at the National Physical Laboratory, UK

International Journal of Machine Tools and Manufacture

Volumn 41, Issue 13-14, 2001, Pages 2113-2121

  Leach, R K ^a  

^a NATIONAL PHYSICAL LABORATORY   (United Kingdom)

Author keywords

Surface texture; Traceability

Indexed keywords

INTERFEROMETERS; PRECISION ENGINEERING; SCANNING; SURFACE TOPOGRAPHY;

CALIBRATION ARTEFACTS; MEASURING INSTRUMENTS;

TEXTURES;

EID: 0035479741     PISSN: 08906955     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0890-6955(01)00078-5     Document Type: Article

References (10)

1. Sub-nanometre surface texture and profile measurement with NanoSurf 2
2. Technology transfer in the development of a nanotopographic instrument
3. Load-dependent behaviour in PTFE-glass slideways
4. Verification of a polarization-insensitive optical interferometer system with subnanometric capability
5. Beam-splitter coatings for producing phase quadrature interferometer outputs
6. Determination and correction of quadrature fringe measurement errors in interferometers
7. Optical fringe subdivision with nanometric accuracy
8. Calibration, traceability and uncertainty issues in surface texture metrology