Laser integrated measurement of surface roughness and micro-displacement

Measurement Science and Technology

Volumn 11, Issue 5, 2000, Pages 454-458

  Wang, S H ^a   Tay, C J ^a   Quan, C ^a   Shang, H M ^a   Zhou, Z F ^b  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b SICHUAN UNIVERSITY   (China)

Author keywords

Light scattering; Micro displacement; Non contact measurement; Optical triangulation; Surface roughness

Indexed keywords

LASER APPLICATIONS; LIGHT SCATTERING; SURFACE ROUGHNESS; TRIANGULATION;

LASER INTEGRATED MEASUREMENT; MICRODISPLACEMENT;

SURFACE MEASUREMENT;

EID: 0033703045     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/11/5/302     Document Type: Article

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