Model-free and Model-based methods for dimensional metrology during the lifetime of a product

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7155, Issue , 2008, Pages

  Weidner, Peter ^a   Kasic, Alexander ^a   Hingst, Thomas ^a   Ehlers, Carsten ^a   Philipp, Sylke ^a   Marschner, Thomas ^a   Moert, Manfred ^a  

^a QIMONDA DRESDEN GMBH AND CO OHG   (Germany)

Author keywords

Early development phase; Inline metrology; Model based dimensional metrology; Model free dimensional metrology; Volume production

Indexed keywords

LIGHT MEASUREMENT; MEASUREMENTS; TECHNOLOGICAL FORECASTING;

EARLY DEVELOPMENT PHASE; INLINE METROLOGY; MODEL BASED DIMENSIONAL METROLOGY; MODEL-FREE DIMENSIONAL METROLOGY; VOLUME PRODUCTION;

PROCESS CONTROL;

EID: 57549095771     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.814534     Document Type: Conference Paper

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