AFM tips for 58 nm and smaller node applications

AIP Conference Proceedings

Volumn 931, Issue , 2007, Pages 545-548

  Heidelberg, Andreas ^a,b   Wu, Xiaoguang ^a   Philipp, Sylke ^a,b   Weidner, Peter ^a,b   Kücher, Peter ^a   Bloeß, Harald ^a,b  

^a QIMONDA DRESDEN GMBH AND CO OHG   (Germany)

^b Fraunhofer Center Nanoelectronic Technologies   (Germany)

Author keywords

3D Metrology; 58 nm DRAM; AFM tips; Inline AFM; Trench structures

Indexed keywords

EID: 35348842673     PISSN: 0094243X     EISSN: 15517616     Source Type: Conference Proceeding    
DOI: 10.1063/1.2799434     Document Type: Conference Paper

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