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Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6152 I, Issue , 2006, Pages

Automatic CD-SEM offline recipe creation for OPC qualification and process monitoring in a DRAM pilot-fab environment

(10) Kramer, Uwe a Marschner, Thomas a Kaiser, Dieter a Winking, Marc a Stief, Christian b Ventola, Stefano b Lewitzki, Dan c Abraham, Zamir c Menadeva, Ovadya c Shukrun, Sam c

a INFINEON TECHNOLOGIES AG (Germany)

b Applied Materials (Germany)

c Applied Materials Inc Israel (Israel)

Author keywords

[No Author keywords available]

Indexed keywords

CONDITION MONITORING; DYNAMIC RANDOM ACCESS STORAGE; FILE EDITORS; MEASUREMENT THEORY; PATTERN RECOGNITION; PRODUCT DEVELOPMENT; SCANNING ELECTRON MICROSCOPY; VIRTUAL REALITY;

DRAM PILOT-FAB ENVIRONMENT; OFFLINE RECIPE EDITOR (ORE) APPLICATIONS; OPC QUALIFICATION WAFERS; PROCESS MONITORING;

PROCESS CONTROL;

EID: 33745611747 PISSN: 0277786X EISSN: None Source Type: Conference Proceeding
DOI: 10.1117/12.654787 Document Type: Conference Paper

Times cited : (7)

References (6)

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