Contactless dielectric charging mechanisms in RF-MEMS capacitive switches

Proceedings of the 36th European Microwave Conference, EuMC 2006

Volumn , Issue , 2006, Pages 1739-1742

  Papaioannou, G J ^a   Wang, G ^b   Bessas, D ^a   Papapolymerou, J ^b  

^a UNIVERSITY OF ATHENS   (Greece)

^b GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Dielectric materials; Microactuators; Microelectromechanical devices; Reliability

Indexed keywords

CAPACITANCE; CHARGE INJECTION; DIELECTRIC DEVICES; DIELECTRIC MATERIALS; MEMS; MICROACTUATORS; POLARIZATION; RELIABILITY ANALYSIS;

DIELECTRIC CHARGING MECHANISMS;

ELECTRIC SWITCHES;

EID: 41649085248     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/EUMC.2006.281478     Document Type: Conference Paper

References (13)

1. C L Goldsmith, J Ehmke, A Malczewski, B Pillans, S Eshelman, Z Yao, J Brank and M Eberly, "Lifetime characterization of capacitive RF MEMS switches" IEEE MTTS Int. Microwave Symp. Digest 2000, 227, 2000.
2. J Wibbeler, G Pfeifer and M Hietschold, SensorsActuators A 71, 74, 1998.
3. X. Yuan, S. Cherepko, J. Hwang, C. I. Goldsmith, C. Nordquist and C. Dyck, "Initial observation and analysis of dielectriccharging effects on RF MEMS capacitive switches," IEEE MTT-S Int. Microwave Symp. Digest 2004, pp. 1943-1946, June 2004.
4. G. M. Rebeiz, "RF MEMS Theory, Design and Technology", Haboken, New Jersey: J. Willey and Sons, 2003.
5. W Merlijn van Spengen, Robert Puers, Robert Mertens and Ingrid de Wolf, J. Micromech. Microeng. 14, 514, 2004.
6. X. Rottenberg, B. Nauwelaers, W. De Raedt and H. A. C. Tilmans, 12th GAAS Symposium, Amsterdam, p.475, 2004.
7. X. Yuan, J. C. M. Hwang, D. Forehand and C. L. Goldsmith, "Modeling and characterization of dielectric-charging effects in RF MEMS capacitive switches," 2005 International Microwave Symposium Digest, pp. 753-756, June 2005.
8. S. Melle, D. De Conto, L. Mazenq, D. Dubuc. B. Poussard, C. Bordas, K. Grenier, L. Bary, O. Vendier, J.L. Muraro, J.L. Cazaux, R. Plana, "Failure predictive model of capacitive RF-MEMS," Microelectronics Reliability 45, 1770, (2005)
9. G. J. Papaioannou, M. Exarchos, V. Theonas, G. Wang and J. Papapolymerou, "Temperature Study of the Dielectric Polarization Effects of Capacitive RF MEMS Switches," IEEE Transactions on Microwave Theory and Techniques, Vol. 53, No. 11, pp. 3467-3473, September 2005.
10. Vandershueren J and Casiot J In: Braunlich P (Ed.) Topics in Applied Physics: "Thermally stimulated relaxation in solids", vol. 37, ch.4, pp 135-223, Springer-Verlag, Berlin, 1979.
11. D T Krick, P. M. Lenahan and J. Kanicki, J. Appl. Phys. 64, 3558, 1988.
12. G. Kriza and G. Mihaly, Phys. Rev. Letters 56, 2529, 1986.
13. R. Ramprasad, Physica Status Solidi B 239, 59, 2003.