SCOPUS 정보 검색 플랫폼

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6923, Issue , 2008, Pages

Water developable negative tone single molecule resists: High sensitivity non-chemically amplified resists

(5) Lawson, Richard A a Lee, Cheng Tsung a Yueh, Wang b Tolbert, Laren c Henderson, Clifford L a

a Georgia Institute of Technology (United States)

b INTEL CORPORATION (United States)

c GEORGIA INSTITUTE OF TECHNOLOGY (United States)

Author keywords

Molecular resist; Non chemically amplified photoresist; Onium salt; Photoacid generator; Single component resist; Single molecule resist; Water development

Indexed keywords

MOLECULAR RESIST; NON-CHEMICALLY AMPLIFIED PHOTORESIST; ONIUM SALT; PHOTOACID GENERATOR; SINGLE COMPONENT RESIST; SINGLE MOLECULE RESIST; WATER DEVELOPMENT;

DISSOLUTION; ELECTRON BEAM LITHOGRAPHY; ELECTRON BEAMS; ELECTRON GUNS; MOLECULES; PARTICLE BEAMS; PHOTORESISTORS; PHOTORESISTS;

IONIZATION OF LIQUIDS;

EID: 57349129352 PISSN: 0277786X EISSN: None Source Type: Conference Proceeding
DOI: 10.1117/12.773188 Document Type: Conference Paper

Times cited : (15)

References (11)

1
- 35148829555
- Bristol, R.L. Proc. SPIE 2007, 6519, 65190W.
- (2007) Proc. SPIE , vol.6519
- Bristol, R.L.¹

2
- 4944228706
- Hu, W.; Bernstein, G. H.; Sarveswaran, K.; and Lieberman, M. J. Vac. Sci. Technol. B 2004, 22, 1711.
- (2004) J. Vac. Sci. Technol. B , vol.22 , pp. 1711
- Hu, W.¹ Bernstein, G.H.² Sarveswaran, K.³ Lieberman, M.⁴

3
- 33751574077
- S.Hosaka, H. Sano, M. Shirai, and H. Sone, Appl. Phys. Lett. 2006, 89, 223131.
- (2006) Appl. Phys. Lett , vol.89 , pp. 223131
- Hosaka, S.¹ Sano, H.² Shirai, M.³ Sone, H.⁴

4
- 29044442587
- I.B. Baek, J.H. Yang, W.J. Cho, C.G. Ahn, K. Im, and S. Lee, J. Vac. Sci. Technol. B 2005, 23, 3120.
- (2005) J. Vac. Sci. Technol. B , vol.23 , pp. 3120
- Baek, I.B.¹ Yang, J.H.² Cho, W.J.³ Ahn, C.G.⁴ Im, K.⁵ Lee, S.⁶

5
- 35148822343
- Jack, K.; Liu, H.; Blakey, I.; Hill, D.; Wang, Y.; Cao, H.; Leeson, M.; Denbeaux, G.; Waterman, J.; Whittaker, A. Proc. SPIE 2007, 6519, 65193Z.
- (2007) Proc. SPIE , vol.6519
- Jack, K.¹ Liu, H.² Blakey, I.³ Hill, D.⁴ Wang, Y.⁵ Cao, H.⁶ Leeson, M.⁷ Denbeaux, G.⁸ Waterman, J.⁹ Whittaker, A.¹⁰

6
- 35148852769
- Ito, T.; Terao, A.; Inao, Y.; Yamaguchi, T.; Mizutani, N. Proc. SPIE 2007, 6519, 65190J.
- (2007) Proc. SPIE , vol.6519
- Ito, T.¹ Terao, A.² Inao, Y.³ Yamaguchi, T.⁴ Mizutani, N.⁵

7
- 34547675885
- Bratton, D.; Ayothi, R.; Deng, H.; Cao, H.B.; and Ober, C.K. Chem. Mater. 2007, 19, 3780-3786.
- (2007) Chem. Mater , vol.19 , pp. 3780-3786
- Bratton, D.¹ Ayothi, R.² Deng, H.³ Cao, H.B.⁴ Ober, C.K.⁵

8
- 35148843817
- Lawson, R. A.; Lee, C.T.; Whetsell, R.; Yueh, W.; Roberts, J.; Tolbert, L.; Henderson, C. L. Proc. SPIE 2007, 6519, 65191N.
- (2007) Proc. SPIE , vol.6519
- Lawson, R.A.¹ Lee, C.T.² Whetsell, R.³ Yueh, W.⁴ Roberts, J.⁵ Tolbert, L.⁶ Henderson, C.L.⁷

9
- 57349161882
- Lawson, R. A.; Lee, C.T.; Yueh, W.; Tolbert, L.; Henderson, C. L. Proc. SPIE 2008 Paper 6923-21
- Lawson, R. A.; Lee, C.T.; Yueh, W.; Tolbert, L.; Henderson, C. L. Proc. SPIE 2008 Paper 6923-21

10
- 0035414101
- Wu, H. and Gonsalves, K.E. Adv. Funct. Mater. 2001, 11, 271-276.
- (2001) Adv. Funct. Mater , vol.11 , pp. 271-276
- Wu, H.¹ Gonsalves, K.E.²

11
- 3843151399
- Pawlowski, A.R.; Acheta, A.; Lalovic, I.; La Fontaine, B.; Levinson, H.J. Proc. SPIE 2004, 5376, 414.
- (2004) Proc. SPIE , vol.5376 , pp. 414
- Pawlowski, A.R.¹ Acheta, A.² Lalovic, I.³ La Fontaine, B.⁴ Levinson, H.J.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.