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Volumn 127, Issue 3, 2005, Pages 515-519

Modal simulation and testing of a micro-manipulator

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; COMPUTER SIMULATION; DEGREES OF FREEDOM (MECHANICS); KINEMATICS; MICROMACHINING; MODAL ANALYSIS;

EID: 25444475843     PISSN: 00220434     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.1978907     Document Type: Article
Times cited : (6)

References (10)
  • 2
    • 0030106402 scopus 로고    scopus 로고
    • Surface-micromachined components for articulated microrobots
    • Yeh, R., Kruglick, E. J. J., and Pister, K. S. J., 1996, "Surface-Micromachined Components for Articulated Microrobots," J. Microelectromech. Syst., 5(1), pp. 10-17.
    • (1996) J. Microelectromech. Syst. , vol.5 , Issue.1 , pp. 10-17
    • Yeh, R.1    Kruglick, E.J.J.2    Pister, K.S.J.3
  • 3
    • 0035337219 scopus 로고    scopus 로고
    • Simulation, dynamic testing and design of micromachined flexible joints
    • Fettig, H., Hubbard, T., and Kujath, M., 2001, "Simulation, Dynamic Testing and Design of Micromachined Flexible Joints," J. Micromech. Microeng., 11(3), pp. 209-216.
    • (2001) J. Micromech. Microeng. , vol.11 , Issue.3 , pp. 209-216
    • Fettig, H.1    Hubbard, T.2    Kujath, M.3
  • 4
    • 0041386066 scopus 로고    scopus 로고
    • Silicon micro XY-stage with a large area shuttle and no-etching holes for SPM-based data storage
    • Kim, C., Jeong, H., Jeon, J., and Kim, Y., 2003, "Silicon Micro XY-stage with a Large Area Shuttle and No-Etching Holes for SPM-Based Data Storage," J. Microelectromech. Syst., 12(4), pp. 470-478.
    • (2003) J. Microelectromech. Syst. , vol.12 , Issue.4 , pp. 470-478
    • Kim, C.1    Jeong, H.2    Jeon, J.3    Kim, Y.4
  • 9
    • 0010447079 scopus 로고    scopus 로고
    • Analysis of complex modes influence on modal correlation of space structures
    • Department of Mechanical Engineering, Dalhousie University, Halifax, Nova Scotia, Canada
    • Kujath, M., Liu, K., and Akpan, U., 1998, "Analysis of Complex Modes Influence on Modal Correlation of Space Structures," Technical report, Department of Mechanical Engineering, Dalhousie University, Halifax, Nova Scotia, Canada.
    • (1998) Technical Report
    • Kujath, M.1    Liu, K.2    Akpan, U.3
  • 10
    • 0027927869 scopus 로고
    • Viscous air damping in laterally driven microresonators
    • Oiso, Japan
    • Zhang, H., 1994, "Viscous Air Damping in Laterally Driven Microresonators," Proc. IEEE Workshop on MicroElectroMechanical Systems, Oiso, Japan, pp. 199-204.
    • (1994) Proc. IEEE Workshop on MicroElectroMechanical Systems , pp. 199-204
    • Zhang, H.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.