-
1
-
-
0003945225
-
-
Cronos Integrated Microsystems, Triangle Park, NC
-
Koester, D. A., Mahadevan, R., Hardy, B., and Markus, K., MUMPs Design Handbook, revision 7.0 (Cronos Integrated Microsystems, Triangle Park, NC).
-
MUMPs Design Handbook, Revision 7.0
-
-
Koester, D.A.1
Mahadevan, R.2
Hardy, B.3
Markus, K.4
-
2
-
-
0030106402
-
Surface-micromachined components for articulated microrobots
-
Yeh, R., Kruglick, E. J. J., and Pister, K. S. J., 1996, "Surface-Micromachined Components for Articulated Microrobots," J. Microelectromech. Syst., 5(1), pp. 10-17.
-
(1996)
J. Microelectromech. Syst.
, vol.5
, Issue.1
, pp. 10-17
-
-
Yeh, R.1
Kruglick, E.J.J.2
Pister, K.S.J.3
-
3
-
-
0035337219
-
Simulation, dynamic testing and design of micromachined flexible joints
-
Fettig, H., Hubbard, T., and Kujath, M., 2001, "Simulation, Dynamic Testing and Design of Micromachined Flexible Joints," J. Micromech. Microeng., 11(3), pp. 209-216.
-
(2001)
J. Micromech. Microeng.
, vol.11
, Issue.3
, pp. 209-216
-
-
Fettig, H.1
Hubbard, T.2
Kujath, M.3
-
4
-
-
0041386066
-
Silicon micro XY-stage with a large area shuttle and no-etching holes for SPM-based data storage
-
Kim, C., Jeong, H., Jeon, J., and Kim, Y., 2003, "Silicon Micro XY-stage with a Large Area Shuttle and No-Etching Holes for SPM-Based Data Storage," J. Microelectromech. Syst., 12(4), pp. 470-478.
-
(2003)
J. Microelectromech. Syst.
, vol.12
, Issue.4
, pp. 470-478
-
-
Kim, C.1
Jeong, H.2
Jeon, J.3
Kim, Y.4
-
5
-
-
33747371734
-
A visually servoed MEMS manipulator
-
Sant'Angelo d'Ischia, Italy
-
Sun, Y., Greminger, M. A., Potasek, D. P., and Nelson, B. J., 2002, "A Visually Servoed MEMS Manipulator," The 8th International Symposium on Experimental Robotics (ISER '02), Sant'Angelo d'Ischia, Italy, #085.
-
(2002)
The 8th International Symposium on Experimental Robotics (ISER '02)
, Issue.85
-
-
Sun, Y.1
Greminger, M.A.2
Potasek, D.P.3
Nelson, B.J.4
-
6
-
-
25444473348
-
Dynamic properties of compliant micro manipulators
-
Mexico City, Mexico
-
Lai, Y., Kujath, M., and Hubbard, T., 2002, "Dynamic Properties of Compliant Micro Manipulators," M35, Proc. of MUSME, the International Symposium on Multibody Systems and Mechantronics, Mexico City, Mexico.
-
(2002)
M35, Proc. of MUSME, the International Symposium on Multibody Systems and Mechantronics
-
-
Lai, Y.1
Kujath, M.2
Hubbard, T.3
-
7
-
-
0030704418
-
Measurement of Young's modulus, Poisson's ratio, and tensile strength of polysilicon
-
Sharpe, W. N., Jr., Yuan, B., Vaidyanathan, R., and Edwards, R. L., 1997, "Measurement of Young's Modulus, Poisson's Ratio, and Tensile Strength of Polysilicon," MEMS'97, Proc., IEEE., Tenth Annual International Workshop On MicroElectroMechanical Systems, pp. 424-429.
-
(1997)
MEMS'97, Proc., IEEE., Tenth Annual International Workshop on MicroElectroMechanical Systems
, pp. 424-429
-
-
Sharpe Jr., W.N.1
Yuan, B.2
Vaidyanathan, R.3
Edwards, R.L.4
-
8
-
-
0004169659
-
-
Prentice Hall, Upper Saddle River, New Jersey
-
Thomson, W. T., and Dahleh, M., 1998, Theory of Vibration with Application, 5th ed., Prentice Hall, Upper Saddle River, New Jersey.
-
(1998)
Theory of Vibration with Application, 5th Ed.
-
-
Thomson, W.T.1
Dahleh, M.2
-
9
-
-
0010447079
-
Analysis of complex modes influence on modal correlation of space structures
-
Department of Mechanical Engineering, Dalhousie University, Halifax, Nova Scotia, Canada
-
Kujath, M., Liu, K., and Akpan, U., 1998, "Analysis of Complex Modes Influence on Modal Correlation of Space Structures," Technical report, Department of Mechanical Engineering, Dalhousie University, Halifax, Nova Scotia, Canada.
-
(1998)
Technical Report
-
-
Kujath, M.1
Liu, K.2
Akpan, U.3
-
10
-
-
0027927869
-
Viscous air damping in laterally driven microresonators
-
Oiso, Japan
-
Zhang, H., 1994, "Viscous Air Damping in Laterally Driven Microresonators," Proc. IEEE Workshop on MicroElectroMechanical Systems, Oiso, Japan, pp. 199-204.
-
(1994)
Proc. IEEE Workshop on MicroElectroMechanical Systems
, pp. 199-204
-
-
Zhang, H.1
|