Piezoelectric push-pull micropositioner for ballistic electron emission microscope

Review of Scientific Instruments

Volumn 68, Issue 10, 1997, Pages 3803-3805

  Shang, Guangyi ^a   Qiu, Xiaohui ^a   Wang, Chen ^a   Bai, Chunli ^a  

^a INSTITUTE OF CHEMISTRY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; CLAMPING DEVICES; FRICTION; PERFORMANCE; PERMANENT MAGNETS; PIEZOELECTRIC DEVICES;

BALLISTIC ELECTRON EMISSION MICROSCOPE; DRIVING VOLTAGE; INSTRUMENTATION; PIEZOELECTRIC PUSH PULL MICROPOSITIONER;

ELECTRON MICROSCOPES;

EID: 0031256640     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1148030     Document Type: Article

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