Characterization and modeling of 2D-glass micro-machining by spark-assisted chemical engraving (SACE) with constant velocity

Journal of Micromechanics and Microengineering

Volumn 18, Issue 6, 2008, Pages

  Didar, Tohid Fatanat ^a   Dolatabadi, Ali ^a   Wüthrich, Rolf ^a  

^a Gina Cody School of Engineering and Computer Science   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC SPARKS; ETCHING; GLASS; MACHINERY; MICROMACHINING;

AND MODELING; CONSTANT SPEEDS; CONSTANT VELOCITIES; EFFECT OF CHEMICALS; ELECTROCHEMICAL DISCHARGES; MACHINING CONDITIONS; MACHINING NONCONDUCTIVE MATERIALS; MACHINING TECHNOLOGIES;

MACHINING;

EID: 57249087562     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/6/065016     Document Type: Conference Paper

References (18)

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