High-Q AIN/SiO2 symmetric composite thin film bulk acoustic wave resonators

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 55, Issue 11, 2008, Pages 2463-2468

  Artieda, Alvaro ^a   Muralt, Paul ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC RESONATORS; ACOUSTIC WAVES; ELASTIC WAVES; HARMONIC ANALYSIS; Q FACTOR MEASUREMENT; RESONATORS; SEMICONDUCTING SILICON COMPOUNDS; SILICON; SILICON COMPOUNDS; THICK FILMS; THIN FILM DEVICES; THIN FILMS; WAVE FILTERS;

ALN FILMS; BULK ACOUSTIC WAVES; COMPOSITE RESONATORS; COMPOSITE THIN FILMS; CONSTANT THICKNESSES; COUPLING COEFFICIENTS; DEEP SILICON ETCHINGS; FILM BULK ACOUSTIC WAVE RESONATORS; FINITE-ELEMENT CALCULATIONS; FIRST HARMONICS; LAYER SEQUENCES; MEMBRANE TYPES; Q FACTORS; QUALITY FACTOR; TEMPERATURE DRIFTS; THIRD HARMONICS;

ACOUSTICS;

SILICON DIOXIDE;

ACOUSTICS; ARTICLE; ARTIFICIAL MEMBRANE; CHEMISTRY; CRYSTALLIZATION; EQUIPMENT; EQUIPMENT DESIGN; INSTRUMENTATION; MATERIALS TESTING; METHODOLOGY; TRANSDUCER; VIBRATION;

ACOUSTICS; CRYSTALLIZATION; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; MATERIALS TESTING; MEMBRANES, ARTIFICIAL; SILICON DIOXIDE; TRANSDUCERS; VIBRATION;

EID: 57049166536     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.953     Document Type: Article

References (10)

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