Structure and optical properties of Si incorporated diamond-like carbon films deposited by r.f. plasma-assisted chemical vapor deposition

Thin Solid Films

Volumn 341, Issue 1, 1999, Pages 68-72

  Lee, Soonil ^a   Kim, Dong Sup ^a   Rhee, Sung Gyu ^a   Oh, Soo Ghee ^a   Lee, Kwang Ryeol ^b  

^a Ajou University   (South Korea)

^b Korea Institute of Science and Technology   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL BONDS; CHEMICAL MODIFICATION; CRYSTAL ATOMIC STRUCTURE; ELECTRONIC DENSITY OF STATES; ELLIPSOMETRY; OPTICAL PROPERTIES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON; STRUCTURE (COMPOSITION);

ATOMIC BONDING STRUCTURES; OPTICAL GAP; SPECTROSCOPIC ELLIPSOMETRY;

DIAMOND FILMS;

EID: 0032654831     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)01527-2     Document Type: Article

References (25)

1. Fujimaki S., Mastumoto H., Kokaku Y., Kitoh M., Tsumita N. J. Vac. Sci. Technol. A. 14:1996;194.
2. Zhang G.F., Guo L.J., Liu Z.T., Xiu X.K., Zheng X. J. Appl. Phys. 76:1994;705.
3. Rusli, Silva S.R.P., Amaratunga G.A.J. Diamond Relat. Mater. 3:1994;817.
4. Robertson J. Adv. Phys. 35:1986;317.
5. Dischler B., Bubenzer A., Koidl P. Solid State Commun. 48:1983;105.
6. Schwan J., Dworschak D., Jung K., Ehrhardt H. Diamond Relat. Mater. 3:1994;1034.
7. Savvides N. J. Appl. Phys. 59:1986;4133.
8. Smith F.W. J. Appl. Phys. 55:1984;764.
9. Oguri K., Arai T. Surf. Coat. Technol. 47:1991;710.
10. Hioki T., Itoh Y., Itoh A., Hibi S., Kawamoto J. Surf. Coat. Technol. 46:1991;233.
11. Miyake S., Miyamoto T., Kaneko R. Wear. 168:1993;155.
12. Meneve J., Dekempeneer E., Smeets J. Diamond Films Technol. 4:1994;23.
13. K.-R. Lee, M.-G Kim, S.-J Cho, K.Y. Eun, T.-Y Seong, Thin Solid Films (1998) in press.
14. Jellison G.E., Modine F.A. Appl. Phys. Lett. 69:1996;371.
15. Forouhi A.R., Bloomer I. Phys. Rev. B. 34:1986;7018.
16. McGahan W.A., Makovicka T., Hale J., Woollam J.A. Thin Solid Films. 253:1994;57.
17. Rusli, Amaratunga G.A.J. Appl. Opt. 57:1995;34.
18. Colthup N.B., Daly L.H., Wiberley S.E. Introduction to Infrared and Raman Spectroscopy. 3rd edn. 1990;Academic Press, San Diego, CA. p. 90.
19. Robertson J., O'Reilly E.P. Phys. Rev. B. 35:1987;2946.
20. Robertson J. Philos. Mag. B. 66:1992;615.
21. Kaufman J.H., Mertin S. Phys. Rev. B. 39:1989;13053.
22. Wagner J., Ramsteiner M., Wild Ch., Koidl P. Phys. Rev. B. 40:1989;1817.
23. Beeman D., Silverman J., Lynds R., Anderson M.R. Phys. Rev. B. 30:1984;870.
24. Saito N., Tanaka N., Nakaaki I. Appl. Phys. A. 38:1985;37.
25. Mui K., Basa D.K., Smith F.W., Corderman R. Phys. Rev. B. 35:1987;8089.