Surface properties of diamond-like carbon films prepared by CVD and PVD methods

Chinese Physics

Volumn 15, Issue 3, 2006, Pages 575-579

  Liu, Dong Ping ^a   Liu, Yan Hong ^b   Chen, Bao Xiang ^a  

^a DALIAN NATIONALITIES UNIVERSITY   (China)

^b DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Atomic force microscope; Diamond like carbon film; Film deposition

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHEMICAL VAPOR DEPOSITION; DEPOSITION; ELECTRON RESONANCE; HYDROGENATION; PHYSICAL VAPOR DEPOSITION; SURFACE PROPERTIES;

ATOMIC HYDROGEN; FILM DEPOSITION; HIGH-ENERGY ION IMPLANTATION;

DIAMOND LIKE CARBON FILMS;

EID: 33644650977     PISSN: 10091963     EISSN: 17414199     Source Type: Journal    
DOI: 10.1088/1009-1963/15/3/022     Document Type: Article

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