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Volumn 310, Issue 23, 2008, Pages 4720-4723

Vapor pressure of germanium precursors

(9) Pangrac J a Fulem, M a,b Hulicius, E a Melichar, K a Simecek T a Ruzicka K b Moravek P a,b Ruzicka V b Rushworth, S A c

a INSTITUTE OF PHYSICS (Czech Republic)

b INSTITUTE OF CHEMICAL TECHNOLOGY (Czech Republic)

c SAFC Hitech (United Kingdom)

Author keywords

A1. Characterization; A1. Phase equilibria; A3. Metalorganic vapor phase epitaxy; B1. Germanium compounds

Indexed keywords

CRYSTAL GROWTH; DEGASSING; DISTILLATION; GERMANIUM; GERMANIUM COMPOUNDS; HYDROSTATIC PRESSURE; MASS SPECTROMETRY; PHASE EQUILIBRIA; VAPOR PRESSURE; VAPORS;

A1. CHARACTERIZATION; A1. PHASE EQUILIBRIA; A3. METALORGANIC VAPOR PHASE EPITAXY; ANTOINE EQUATIONS; B1. GERMANIUM COMPOUNDS; BEFORE AND AFTER; LOW TEMPERATURES; METHOXY; STATIC METHODS; TEMPERATURE RANGES; TETRAKIS; VACUUM DISTILLATIONS; VAPOR PRESSURE DATUMS;

VAPOR PHASE EPITAXY;

EID: 56249149211 PISSN: 00220248 EISSN: None Source Type: Journal
DOI: 10.1016/j.jcrysgro.2008.06.063 Document Type: Article

Times cited : (14)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.