Vapour pressure and heat capacities of metal organic precursors, Y(thd)3 and Zr(thd)4

Journal of Crystal Growth

Volumn 264, Issue 1-3, 2004, Pages 192-200

  Fulem, Michal ^a,b   Růžička, Květoslav ^a   Růžička, Vlastimil ^a   Šimeček, Tomislav ^b   Hulicius, Eduard ^b   Pangrác, Jiří ^b  

^a INSTITUTE OF CHEMICAL TECHNOLOGY   (Czech Republic)

^b INSTITUTE OF PHYSICS   (Czech Republic)

Author keywords

A1. Static method; A1. Vapour pressure; A3. Metalorganic chemical vapor deposition; B1. diketonate complexes; B1. Y and Zr precursors

Indexed keywords

HIGH TEMPERATURE EFFECTS; MELTING; METALLORGANIC CHEMICAL VAPOR DEPOSITION; PRESSURE MEASUREMENT; SPECIFIC HEAT; SUPERCONDUCTING MATERIALS; VAPOR PRESSURE;

Β-DIKETONATE COMPLEXES; STATIC METHOD; Y AND ZN PRECURSORS;

YTTRIUM COMPOUNDS;

EID: 1342306670     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2003.12.016     Document Type: Article

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