Measurement of vapour pressure of In-based metalorganics for MOVPE

Journal of Crystal Growth

Volumn 272, Issue 1-4 SPEC. ISS., 2004, Pages 42-46

  Fulem, M ^a   Ruzicka K ^b   Ruzicka V ^b   Hulicius, E ^a   Simecek T ^a   Pangrac J ^a   Rushworth, S A ^c   Smith, L M ^c  

^a INSTITUTE OF PHYSICS   (Czech Republic)

^b INSTITUTE OF CHEMICAL TECHNOLOGY   (Czech Republic)

^c Epichem Ltd   (United Kingdom)

Author keywords

A1. Vapour pressure; B1. Solution TMI ; B1. Trimethylindium

Indexed keywords

FLOW OF FLUIDS; HYDROCARBONS; INDIUM; METALLORGANIC VAPOR PHASE EPITAXY; PRESSURE MEASUREMENT; SOLUTIONS; THERMODYNAMICS; VAPOR PRESSURE;

DIMETHYLDODECYLAMINE; METALORGANICS; PRECURSORS; TRIMETHYLINDIUM;

ORGANOMETALLICS;

EID: 9944227126     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2004.09.001     Document Type: Conference Paper

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