Vapour pressure measurement of metal organic precursors used for MOVPE

Journal of Chemical Thermodynamics

Volumn 38, Issue 3, 2006, Pages 312-322

  Fulem, M ^a,b   Ruzicka K ^c   Ruzicka V ^c   Simecek T ^a   Hulicius, E ^a   Pangrac J ^a  

^a INSTITUTE OF PHYSICS   (Czech Republic)

^b UNIVERSITY OF PORTO   (Portugal)

^c INSTITUTE OF CHEMICAL TECHNOLOGY   (Czech Republic)

Author keywords

Metal organic vapour phase epitaxy; Triethylantimony; Trimethylaluminium; Trimethylgallium; Vapour pressure

Indexed keywords

ALUMINUM COMPOUNDS; ANTIMONY COMPOUNDS; DATA REDUCTION; GALLIUM COMPOUNDS; METALLORGANIC VAPOR PHASE EPITAXY; ORGANOMETALLICS;

TRIETHYLANTIMONY; TRIMETHYLALUMINUM; TRIMETHYLGALLIUM;

VAPOR PRESSURE;

EID: 33244468858     PISSN: 00219614     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jct.2005.05.018     Document Type: Article

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