Effect of the AIN nucleation layer growth on AlN material quality

Journal of Crystal Growth

Volumn 310, Issue 23, 2008, Pages 4932-4934

  Reentila O ^a   Brunner, F ^a   Knauer, A ^a   Mogilatenko, A ^b   Neumann, W ^b   Protzmann, H ^c   Heuken, M ^c   Kneissl, M ^a,d   Weyers, M ^a   Trankle G ^a  

^a LEIBNIZ INSTITUT FÜR HÖCHSTFREQUENZTECHNIK   (Germany)

^b HUMBOLDT UNIVERSITY   (Germany)

^c AIXTRON AG   (Germany)

^d TECHNISCHE UNIVERSITÄT BERLIN   (Germany)

Author keywords

A1. High resolution X ray diffraction; A3. Metalorganic vapor phase epitaxy; B1. Aluminum nitride; B1. Nitrides

Indexed keywords

ALUMINA; ALUMINUM COMPOUNDS; CRYSTAL GROWTH; DIFFRACTION; EPITAXIAL GROWTH; HIGH RESOLUTION ELECTRON MICROSCOPY; MICROSCOPIC EXAMINATION; NITRIDES; NUCLEATION; SINGLE CRYSTALS; STRUCTURAL ANALYSIS; VAPOR PHASE EPITAXY; VAPORS; X RAY DIFFRACTION; X RAY DIFFRACTION ANALYSIS;

A1. HIGH-RESOLUTION X-RAY DIFFRACTION; A3. METALORGANIC VAPOR-PHASE EPITAXY; ALN LAYERS; B1. ALUMINUM NITRIDE; B1. NITRIDES; DIFFRACTOMETRY; DISLOCATION DENSITIES; FLOW CONDITIONS; HIGH RESOLUTIONS; HIGH TEMPERATURES; MATERIAL QUALITIES; METAL ORGANIC; NUCLEATION LAYERS; STRUCTURAL QUALITIES;

HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY;

EID: 56249127483     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2008.07.083     Document Type: Article

References (11)

1. Asif Khan M., Balakrishnan K., and Katona T. Nat. Photonics 2 (2008) 77
2. Brunner F., Protzmann H., Heuken M., Knauer A., Weyers M., and Kneissl M. Phys. Stat. Sol. c 5 (2008) 1799
3. Ohba Y., Yoshida H., and Sato R. Jpn. J. Appl. Phys. 36 (1997) L1565
4. Asif Khan M., Kuznia J.N., Skogman R.A., Olson D.T., Mac Millan M., and Choyke W.J. Appl. Phys. Lett. 61 (1992) 2539
5. Imura M., Fujimoto N., Okada N., Balakrishnan K., Iwaya M., Kamiyama S., Amano H., Akasaki I., Noro T., Tagaki T., and Bandoh A. J. Crystal Growth 300 (2007) 136
6. Okada N., Kato N., Sato S., Sumii T., Nagai T., Fujimoto N., Imura M., Balakrishnan K., Iwaya M., Kamiyama S., Amano H., Akasaki I., Maruyama H., Tagaki T., Noro T., and Bandoh A. J. Crystal Growth 298 (2007) 349
7. Paduano Q., and Weyburne D. Jpn. J. Appl. Phys. 42 (2003) 1590
8. Imura M., Nakano K., Kitatano T., Narita G., Okada N., Balakrishnan K., Iwaya M., Kamiyama S., Amano H., Akasaki I., Shimono K., Noro T., and Takagi T. Appl. Phys. Lett. 89 (2006) 221901
9. Srikant V., Speck J.S., and Clarke D.R. J. Appl. Phys. 82 (1997) 4286
10. Heinke H., Kirchner V., Einfeldt S., and Hommel D. Appl. Phys. Lett. 77 (2000) 2145
11. Wu Y., Hanlon A., Kaeding J.F., Sharma R., Fini P.T., Nakamura S., and Speck S. Appl. Phys. Lett. 84 (2004) 912