Micromachined FBAR RF filters for advanced handset applications

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 1, Issue , 2003, Pages 911-914

  Park, J Y ^a   Lee, H C ^a   Lee, K H ^a   Lee, H M ^a   Ko, Y J ^a   Shin, J H ^b   Moon, S H ^b   Bu, J U ^a  

^a LG Electronics Inc   (South Korea)

^b LG Innotek Co Ltd   (South Korea)

Author keywords

Attenuation; Band pass filters; Film bulk acoustic resonators; Insertion loss; Multiaccess communication; Personal communication networks; Radio frequency; Resonator filters; Silicon; Telephone sets

Indexed keywords

ACOUSTIC RESONATORS; ACTUATORS; ALUMINUM NITRIDE; ANTENNAS; BANDPASS FILTERS; CODE DIVISION MULTIPLE ACCESS; DESIGN; ELECTRIC CONNECTORS; INSERTION LOSSES; MICROMACHINING; MICROSYSTEMS; MICROWAVE FILTERS; PERSONAL COMMUNICATION SYSTEMS; RADIO COMMUNICATION; RADIO TELEPHONE; SILICON; SILICON NITRIDE; SOLID-STATE SENSORS; TELECOMMUNICATION NETWORKS; TELEPHONE SETS; TRANSDUCERS; WAVE FILTERS;

ATTENUATION; FILM BULK ACOUSTIC RESONATORS; MULTI-ACCESS COMMUNICATIONS; RADIO FREQUENCIES; RESONATOR FILTERS;

ACOUSTIC SURFACE WAVE FILTERS;

EID: 18744401530     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215623     Document Type: Conference Paper

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