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Volumn 14, Issue 4, 2009, Pages 1664-1678

Vibrational analysis of electrostatically actuated microstructures considering nonlinear effects

Author keywords

Multi layer microplates; Nonlinearity; Pull in instability; Squeeze film damping; Vibrations

Indexed keywords

DAMPING; DYNAMICAL SYSTEMS; EIGENVALUES AND EIGENFUNCTIONS; FINITE ELEMENT METHOD; MICROSTRUCTURE; NONLINEAR EQUATIONS; PLATES (STRUCTURAL COMPONENTS); SHEAR DEFORMATION; VIBRATION ANALYSIS;

EID: 55549099557     PISSN: 10075704     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.cnsns.2008.05.009     Document Type: Article
Times cited : (86)

References (14)
  • 1
    • 85196206800 scopus 로고    scopus 로고
    • Osterberg PM. Electrostatically actuated microelectromechanical test structures for material property measurement. PhD dissertation, Massachusetts Institute of Technology, 1995.
    • Osterberg PM. Electrostatically actuated microelectromechanical test structures for material property measurement. PhD dissertation, Massachusetts Institute of Technology, 1995.
  • 2
    • 85196211507 scopus 로고    scopus 로고
    • Younis MI. Modeling and simulation of microelectromechanical systems in multi-physics fields. PhD dissertation, Virginia Polytechnic Institute and state University, 2004.
    • Younis MI. Modeling and simulation of microelectromechanical systems in multi-physics fields. PhD dissertation, Virginia Polytechnic Institute and state University, 2004.
  • 3
    • 1342305029 scopus 로고    scopus 로고
    • A new approach to the modeling and simulation of flexible microstructures under the effect of squeeze film damping
    • Nayfeh A.H., and Younis M.I. A new approach to the modeling and simulation of flexible microstructures under the effect of squeeze film damping. J Micromech Microeng 14 (2004) 170-181
    • (2004) J Micromech Microeng , vol.14 , pp. 170-181
    • Nayfeh, A.H.1    Younis, M.I.2
  • 4
    • 0037404883 scopus 로고    scopus 로고
    • Numerical analysis on snapping induced by electromechanical interaction of shuffling actuator with nonlinear plate
    • Zhou Y.H., and Yang X. Numerical analysis on snapping induced by electromechanical interaction of shuffling actuator with nonlinear plate. Comput Struct 81 (2003) 255-264
    • (2003) Comput Struct , vol.81 , pp. 255-264
    • Zhou, Y.H.1    Yang, X.2
  • 5
    • 17044385793 scopus 로고    scopus 로고
    • Optimal design of an electrostatically actuated microbeam for maximum pull-in voltage
    • Abdalla M.M., Reddy C.K., Faris W.F., and Gurdal Z. Optimal design of an electrostatically actuated microbeam for maximum pull-in voltage. Comput Struct 83 (2005) 1320-1329
    • (2005) Comput Struct , vol.83 , pp. 1320-1329
    • Abdalla, M.M.1    Reddy, C.K.2    Faris, W.F.3    Gurdal, Z.4
  • 6
    • 4444257701 scopus 로고    scopus 로고
    • An analytical model for pull-in voltage of clamped-clamped multi-layer beams
    • Rong H., Huang Q.A., Nie M., and Li W. An analytical model for pull-in voltage of clamped-clamped multi-layer beams. Sensors Actuators A 116 (2004) 15-21
    • (2004) Sensors Actuators A , vol.116 , pp. 15-21
    • Rong, H.1    Huang, Q.A.2    Nie, M.3    Li, W.4
  • 7
    • 0029296703 scopus 로고
    • equivalent-circuit model of the squeezed gas film in a silicon accelerometer
    • Veijola T., Kuisma H., Lahdenpera J., and Ryhanen T. equivalent-circuit model of the squeezed gas film in a silicon accelerometer. J Sensors Actuators A48 (1995) 235-248
    • (1995) J Sensors Actuators , vol.A48 , pp. 235-248
    • Veijola, T.1    Kuisma, H.2    Lahdenpera, J.3    Ryhanen, T.4
  • 8
    • 33645796930 scopus 로고    scopus 로고
    • Complex nonlinear oscillations in electrostatically actuated microstructures
    • De S.K., and Aluru N.R. Complex nonlinear oscillations in electrostatically actuated microstructures. J Microelectromech Syst 15 2 (2006) 355-369
    • (2006) J Microelectromech Syst , vol.15 , Issue.2 , pp. 355-369
    • De, S.K.1    Aluru, N.R.2
  • 9
    • 35348818744 scopus 로고    scopus 로고
    • Characterization of coupled-domain multi-layer microplates in pull-in phenomenon, vibrations and dynamics
    • Moghimi Zand M., and Ahmadian M.T. Characterization of coupled-domain multi-layer microplates in pull-in phenomenon, vibrations and dynamics. Int J Mech Sci 49 11 (2007) 1226-1237
    • (2007) Int J Mech Sci , vol.49 , Issue.11 , pp. 1226-1237
    • Moghimi Zand, M.1    Ahmadian, M.T.2
  • 10
    • 85196170119 scopus 로고    scopus 로고
    • Reddy JN. Mechanics of laminated composite plates and shells: theory and analysis. CRC Press; 2003, p. 856, ISBN 139780849315923.
    • Reddy JN. Mechanics of laminated composite plates and shells: theory and analysis. CRC Press; 2003, p. 856, ISBN 139780849315923.
  • 11
    • 34249878462 scopus 로고    scopus 로고
    • Lyapunov exponents as a criterion for the dynamic pull-in instability of electrostatically actuated microstructures
    • Krylov S. Lyapunov exponents as a criterion for the dynamic pull-in instability of electrostatically actuated microstructures. Int J Non-Linear Mech 42 (2007) 626-642
    • (2007) Int J Non-Linear Mech , vol.42 , pp. 626-642
    • Krylov, S.1
  • 12
    • 17444404224 scopus 로고    scopus 로고
    • A closed-form model for the pull-in voltage of electrostatically actuated cantilever beams
    • Chowdhury S., Ahmadi M., and Miller W.C. A closed-form model for the pull-in voltage of electrostatically actuated cantilever beams. J Micromech Microeng 15 4 (2005) 756-763
    • (2005) J Micromech Microeng , vol.15 , Issue.4 , pp. 756-763
    • Chowdhury, S.1    Ahmadi, M.2    Miller, W.C.3
  • 13
    • 4444272849 scopus 로고    scopus 로고
    • Pull-in dynamics of an elastic beam actuated by continuously distributed electrostatic force
    • Krylov S., and Maimon R. Pull-in dynamics of an elastic beam actuated by continuously distributed electrostatic force. ASME J Vib Acoust 126 3 (2004) 332-342
    • (2004) ASME J Vib Acoust , vol.126 , Issue.3 , pp. 332-342
    • Krylov, S.1    Maimon, R.2
  • 14
    • 28844431584 scopus 로고    scopus 로고
    • Experimental modal analysis for microelectromechanical systems
    • Ozdoganlar O.B., Hansche B.D., and Carne T.G. Experimental modal analysis for microelectromechanical systems. Exp Mech 45 6 (2005) 498-506
    • (2005) Exp Mech , vol.45 , Issue.6 , pp. 498-506
    • Ozdoganlar, O.B.1    Hansche, B.D.2    Carne, T.G.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.