Experimental modal analysis for microelectromechanical systems

Experimental Mechanics

Volumn 45, Issue 6, 2005, Pages 498-506

  Ozdoganlar, O Burak ^a   Hansche, B D ^b   Carne, T G ^b  

^a CARNEGIE MELLON UNIVERSITY   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Gas damping; LIGA; MEMS; MEMS dynamics; Microsystems; Modal analysis

Indexed keywords

DAMPING; EQUATIONS OF MOTION; EXPERIMENTS; FOURIER TRANSFORMS; INTERFEROMETERS; MATHEMATICAL MODELS; MODAL ANALYSIS;

GAS DAMPING; MICROELECTROMECHANICAL SYSTEMS (MEMS); MICROSYSTEMS;

MICROELECTROMECHANICAL DEVICES;

ELECTROMECHANICAL EQUIPMENT;

EID: 28844431584     PISSN: 00144851     EISSN: None     Source Type: Journal    
DOI: 10.1177/0014485105059991     Document Type: Article

References (35)

1. Rembe, C., Tibken, B., and Hofer E., "Analysis of the Dynamics in Microactuators Using High-speed Cine Photomicrography," Journal of Microelectromechanical Systems, 10 (1), 137-145 (2001).
2. Shi, F., Ramesh, P., and Mukherjee, S., "Dynamic Analysis of Microelectromechanical Systems," International Journal of Numerical Methods in Engineering, 39 (24), 4119-4139 (1996).
3. Eaton, W., Smith, N., Irwin, L, and Tanner D., "Characterization Techniques for Surface-micromachined Devices," Proceedings of the SPIE, 3514, 431-438 (1998).
4. Schnitzer R., Ruemmler N., Grosser V., and Michel, B., "Vibration Measurement of Microstructures by Means of Laser Optical Modal Analysis," Proceedings of the SPIE, 3825, 72-79 (1999).
5. LaVigne, G.F. and Miller S.L., "A Performance Analysis System for MEMS Using Automated Imaging Methods," Proceedings of the IEEE International Testing Conference, Washington, DC, 442-447 (1998).
6. Ngoi, B., Venkatakrishnan, K., Tan, B., Noel, N., Shen, Z., and Chin, C., "Two-axis-scanning Laser Doppler Vibrometer for Microstructure," Optics Communications, 182 (1-3), 175-185 (2000).
7. Lai, W.-P. and Fang, W., "Novel Bulk Acoustic Wave Hammer to Determinate the Dynamic Response of Microstructures Using Pulsed Broad Bandwidth Ultrasonic Transducers," Sensors and Actuators A: Physical, 96, 43-52 (2002).
8. Ewins, D.J., Modal Testing: Theory, Practice and Application, 2nd edition, Research Studies Press, Baldock, Hertfordshire, UK (2000).
9. Maia, N.M.M. and de Silva, J.M.M., editors, Theoretical and Experimental Modal Analysis, Research Studies Press, Taunton, Somerset, UK (1997).
10. Burdess, J., Harris, A., Wood, D., Pitcher R., and Glennie, D., "A System for the Dynamic Characterization of Microstructures, " Journal of Microelectromechanical Systems, 6 (4), 322-328 (1997).
11. Chou, Y.F. and Wang, L.C., "On the Modal Testing of Microstructures: Its Theoretical Approach and Experimental Setup," ASME Journal of Vibration and Acoustics, 123(1), 104-109 (2001).
12. Zhang, P.Q., Wang, Q.M., Tang, X.O., and Huang, T.C., "Experimental Research on Dynamic Properties of Mini-small Object," Proceedings of the International Modal Analysis Conference (IMAC), Florence, Italy, April 15-18, Vol. 2, 1528-1535 (1991).
13. Chen, J.S., Su, C.P., and Chou, Y.F., "Modal Analysis for Miniature Structures," Proceedings of the International Modal Analysis Conference (IMAC), Nashville, TN, February, Vol, 5, 969-975 (1995).
14. Zhang, P., Tang, X., Shan, B., Brandon, J., and Kwan, A., "Analytical and Experimental Modal Analysis for Operational Validation and Calibration of a Miniature Silicon Sensor" Journal of Sound and Vibration, 214 (5), 903-913 (1998).
15. Ye, X.Y., Zhou, Z.Y., Yang, Y., Zhang, J.H., and Yao, J., "Determination of the Mechanical Properties of Microstructures," Sensors and Actuators A: Physical, 54, 750-754 (1996).
16. Hoummady, M., Farnault, E., Kawakatsu, H., and Masuzawa, T., "Applications of Dynamic Techniques for Accurate Determination of Silicon Nitride Young's Moduli," Proceedings of the International Conference on Solid-State Sensors and Actuators. Vol. 1, 615-618 (1997).
17. Smith, N., Tanner D., Swanson, S., and Miller S., "Non-destructive Resonant Frequency Measurement on MEMS Actuators," Proceedings of the IEEE International Reliability Physics Symposium, 30 April-3 May, Orlando, FL, 99-105 (2001).
18. Zook, J., Burns, D., Guckel, H., Sniegowski, J., Engelstad, R., and Fend, Z., "Characteristics of Polysilicon Resonant Microbeams, " Sensors and Actuators A: Physical, 35 (1), 51-59 (1992).
19. Yasumura, K., Stowe, T., Chow, E., Pfafman, T., Kenny, T., Stipe, B., and Rugar D., "Quality Factors in Micron- and Submicron-thick Cantilevers," Journal of Microelectromechanical Systems, 9 (1), 117 (2000).
20. Ijntema, D.J. and Tilmans, H.A.C., "Static and Dynamic Aspects of an Air-gap Capacitor" Sensors and Actuators A: Physical, 35 (2), 121-128 (1992).
21. Tilmans, H.A.C., IJntema, D.J., and Fluitman, J.H.J., "Single Element Excitation and Detection of(Micro)Mechanical Resonators, " Proceedings of the International Conference on Solid-State Sensors and Actuators (TRANSDUCERS '91), San Francisco, CA, 533-537 (1991).
22. Burns, D.J. and Helbig, H.F., "A System for Automatic Electrical and Optical Characterization of Microelectromechanical Devices," Journal of Microelectromechanical Systems, 8 (4), 473-482 (1999).
23. Bouwstra, S., Tilmans, H.A.C., Selvakumar A., and Najafi, K., "Base Driven Micromechanical Resonators," Proceedings of the IEEE Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, 148-152 (1992).
24. Zalalutdinov, M., Zehnder A., Olkhovets, A., Turner S., Sekaric, L., Hic, B., Czaplewski, D.A., Parpia, I.M., and Craigead, H.G., "Autoparameter Drive for Micromechanical Oscillators," Applied Physics Letters, 79 (5), 695-697 (2001).
25. Carne, T.G., Martinez, D.R., and Nord, A.R., "A Comparison of Fixed-base and Driven-base Modal Testing of an Electronics Package," Proceedings of the International Modal Analysis Conference, Las Vegas, NV, 672-679 (1989).
26. Lee, J.-C. and Chou, Y.-F., "Driven-base Modal Parameter Estimation for Continuous Structures," Proceedings of the International Modal Analysis Conference (IMAC), Florence, Italy, April 15-18, Vol. 1, 711-718 (1991).
27. Temesvary, V., Wu, S., Hsieh, W.H., Tai, Y.-C., and Miu, D.K., "Design Fabrication and Testing of Silicon Microgimbals for Super-compact Rigid Disk Drives," Journal of Microelectromechanical Systems, 4 (1), 18-27 (1995).
28. Burdess, J., Harris, A., Pitcher, R., Ward, M., King, D., and Wood, D., "Mechanical Characterization of a Polysilicon Accelerometer " Proceedings of the IEE Colloquium on Silicon Fabricated Inertial Instruments, London, UK, 7/1-7/7 (1996).
29. Hart, M., Conant, R., Lau, K., and Muller R., "Stroboscopic Interferometer System for Dynamic MEMS Characterization," Journal of Microelectromechanical Systems, 9 (4), 409-418 (2000).
30. Cloud, G.-L., Optical Methods of Engineering Analysis, Cambridge University Press, Cambridge (1995).
31. Zhang, P.Q., Wang, Q.M., Wu, X.P., and Huang, T.C., "Experimental Modal Analysis of Miniature Objects by Optical Measurement Technique," International Journal of Analytical and Experimental Modal Analysis, 7 (4), 243-253 (1992).
32. de Boer M.P., Luck, D.L., Walraven, J.A., and Redmond, J.M., "Characterization of an Inchworm Actuator Fabricated by Polysilicon Surface Micromachining," Proceedings of the SPIE Reliability, Testing, and Characterization of MEMS/MOEMS, San Francisco, CA, 169-180 (2001).
33. Turner, K.L., Hartwell, P.G., and Macdonald, N.C., "Multidimensional MEMS Motion Characterization Using Laser Vibrometry," Proceedings of Transducers'99, the 10th International Conference on Solid-State Sensors and Actuators, Sendai, Japan, 1144-1147 (1999).
34. Schwarz, B.J. and Richardson, M.H., "Experimental Modal Analysis," Proceedings of the CSI Reliability Week, Orlando, FL (1999).
35. Richardson, M.H. and Formenti, D.L., "Parameter Estimation from Frequency Response Measurements Using Rational Fraction Polynomials," Proceedings of the International Modal Analysis Conference, Orlando, FL, 167-181 (1982).