메뉴 건너뛰기




Volumn 26, Issue 6, 2008, Pages 1487-1496

Effect of oxygen on growth and properties of diamond thin film deposited at low surface temperature

Author keywords

[No Author keywords available]

Indexed keywords

DIAMOND FILMS; FILM GROWTH; OPTICAL EMISSION SPECTROSCOPY; OXYGEN; PLASMA CVD; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYCRYSTALLINE MATERIALS; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS; SINGLE CRYSTALS; THIN FILMS; X RAY DIFFRACTION;

EID: 55349123265     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2998807     Document Type: Article
Times cited : (17)

References (35)
  • 26
    • 55349092459 scopus 로고    scopus 로고
    • PEAKFIT 4.0 for Windows User's Manual, Peak Separation and Analysis Software, Copyright 1997 by AISN Software (SPSS Inc., Chicago, IL).
    • PEAKFIT 4.0 for Windows User's Manual, Peak Separation and Analysis Software, Copyright 1997 by AISN Software (SPSS Inc., Chicago, IL, 1997).
    • (1997)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.