Cantilever fabrication by force-free release transfer

Japanese Journal of Applied Physics

Volumn 47, Issue 6 PART 2, 2008, Pages 5248-5251

  Kawata, Hiroaki ^a   Ryugou, Kenichi ^a   Ohta, Saki ^a   Yasuda, Masaaki ^a   Hirai, Yoshihiko ^a  

^a Osaka City University   (Japan)

Author keywords

Force free release; PMMA; Release layer; SU 8; TiO2; Transfer printing

Indexed keywords

ESTERS; PHOTORESISTS;

FORCE-FREE RELEASE; PMMA; RELEASE LAYER; SU-8; TIO2; TRANSFER PRINTING;

SUBSTRATES;

EID: 55049106728     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.47.5248     Document Type: Article

References (15)

1. M. Tanaka: Microelectron. Eng. 84 (2007) 1341.
2. M. Seki, T. Masuda, Y. Uno, F. Satou, Y. Iraanaka, and S. Sugiyama: IEEE Trans. Sens. Micromach. 126 (2006) 65 [in Japanese].
3. Y.-T. Song, H.-Y. Lee, and M. Esashi: Sens. Actuators A 135 (2007) 818.
4. K. Hane, K. Umemori, and Y. Kanamori: IEICE Trans. Electron. E90-C (2007) 51.
5. S.-M. Seo, J. H. Kim, T.-I. Kim, and H. H. Lee: Appl. Phys. Lett. 88 (2006) 023118.
6. X. Yu, S. Yu, Z. Wang, D. Ma, and Y. Han: Appl. Phys. Lett. 88 (2006) 263517.
7. S. Matsui, Y. Igaku, H. Ishigaki, J. Fujita, M. Ishida, Y. Ochiai, H. Nakamatsu, and M. Komuro: J. Vac. Sci. Technol. B 21 (2003) 688.
8. H. Kawata, T. Ueno, M. Yasuda, and Y. Hirai: Jpn. J. Appl. Phys. 42 (2003) 3854.
9. H. Kawata, M. Yasuda, and Y. Hirai: Sens. Mater. 16 (2004) 211.
10. J. Y. Kim and C.-J. Kim: MEMS97 (Nagoya, Japan), 1997, p. 448.
11. X. Gu, C. A. Michaels, D. Nguyen, Y. C. Jean, J. W. Martin, and T. Nguyen: Appl. Surf. Sci. 252 (2006) 5168.
12. M. Kitano, M. Matsuoka, M. Ueshima, and M. Anpo: Appl. Catal. A 325 (2007) 1.
13. Y. Mirai, N. Takagi, S. Harada, and Y. Tanaka: IEEJ Trans. Sens. Micromach. 122 (2002) 404.
14. C. K. Chung and Y. Z. Hong; J. Micromech. Microeng. 17 (2007) 207.
15. H. Lorenz, M. Laudon, and P. Renaud: Microelectron. Eng. 41-42 (1998) 371.