Plasma-enhanced CVD for particle synthesis using circulating fluidized bed technology

Chemical Vapor Deposition

Volumn 13, Issue 9, 2007, Pages 499-506

  Von Rohr, Philipp Rudolf ^a   Borer, Beat ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

Circulating fluidized bed; Coating; Particle technology; PECVD; Surface modification

Indexed keywords

FLUID DYNAMICS; FLUIDIZATION; FLUIDIZED BED COMBUSTION; FLUIDIZED BED PROCESS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMAS;

CIRCULATING FLUIDIZED BED; CIRCULATING FLUIDIZED BEDS; LOW TEMPERATURES; MODEL SUBSTRATES; NEW TECHNOLOGIES; PARTICLE SYNTHESES; PARTICLE TECHNOLOGY; PECVD; SOLID REACTIONS; SPECIFIC DESIGNS; SURFACE MODIFICATION; THERMAL PLASMAS;

FLUIDIZED BEDS;

EID: 54949156046     PISSN: 09481907     EISSN: 15213862     Source Type: Journal    
DOI: 10.1002/cvde.200706615     Document Type: Article

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