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Journal of Applied Physics

Volumn 104, Issue 6, 2008, Pages

Local strain distributions in silicon-on-insulator/stressor-film composites

(3) Kalenci, Özgür a Murray, Conal E b Noyan, I C a

a Columbia University ^* (United States)

b IBM T J WATSON RESEARCH CENTER (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 54749095577 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.2975992 Document Type: Article

Times cited : (7)

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