Mapping local strain in thin film/substrate systems using x-ray microdiffraction topography

Applied Physics Letters

Volumn 90, Issue 9, 2007, Pages

  Yan, Hanfei ^a   Murray, Conal E ^b   Noyan, I C ^a  

^a Columbia University ^*  (United States)

^b IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FUNCTIONS; SUBSTRATES; SURFACE TOPOGRAPHY; THIN FILMS; X RAY DIFFRACTION;

DIFFRACTION THEORY; STRAIN DISTRIBUTION; X-RAY INTENSITY; X-RAY MICRODIFFRACTION TOPOGRAPHY;

STRAIN MEASUREMENT;

EID: 33847659120     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2711189     Document Type: Article

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