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Volumn 76, Issue 7, 2003, Pages 1109-1112

Three-dimensional structuring of sapphire by sequential He+ ion-beam implantation and wet chemical etching

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL LATTICES; ETCHING; ION BEAMS; POSITIVE IONS;

WET CHEMICAL ETCHING;

SAPPHIRE;

EID: 0038680601 PISSN: 09478396 EISSN: None Source Type: Journal
DOI: 10.1007/s00339-002-2027-y Document Type: Article

Times cited : (16)

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