Study of silicon micromachining using diode-pumped solid-state lasers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5339, Issue , 2004, Pages 64-72

  Li, Mingwei ^a   Hartke, Kevin ^b  

^a Spectra Physics Lasers Division   (United States)

^b Mound Laser and Photonics Center Inc   (United States)

Author keywords

Diode pumped; Laser; Micromachining; Silicon

Indexed keywords

DIODE-PUMPED LASERS; MECHANICAL MACHINING; PULSEWIDTH LASERS; SEMICONDUCTOR MACHINING;

EVAPORATION; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; Q SWITCHED LASERS; SEMICONDUCTOR LASERS; SEMICONDUCTOR MATERIALS; SILICON; SURFACE ROUGHNESS;

SOLID STATE LASERS;

EID: 5444223555     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.529698     Document Type: Conference Paper

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