Effect of laser parameters on semiconductor micromachining using diode -pumped solid-state lasers

ICALEO 2003 - 22nd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings

Volumn , Issue , 2003, Pages

  Li, Mingwei ^a   Hartke, Kevin ^b  

^a Spectra Physics Lasers Division   (United States)

^b Mound Laser and Photonics Center Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMECHANICAL DEVICES; MEMS; MICROMACHINING; OPTICAL PUMPING; PULSE REPETITION RATE; Q SWITCHED LASERS; SAPPHIRE; SEMICONDUCTOR DIODES; SEMICONDUCTOR LASERS; SEMICONDUCTOR MATERIALS; SILICON WAFERS;

DIODE PUMPED SOLID STATE LASER; DRILLING PROCESS; HIGH-PRECISION; LASER MICRO-MACHINING; LASER PARAMETERS; MICRO ELECTROMECHANICAL SYSTEM (MEMS); PULSEWIDTH LASERS; REPETITION RATE;

SOLID STATE LASERS;

EID: 57349158099     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.2351/1.5060136     Document Type: Conference Paper

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