Speed rate improvement for microcutting of thin silicon with femtosecond laser pulses

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4830, Issue , 2002, Pages 531-536

  Tönshoff, Hans Kurt ^a   Ostendorf, Andreas ^a   Körber, Klaus ^a   Bärsch, Niko ^a  

^a LASER ZENTRUM HANNOVER E V   (Germany)

Author keywords

Femtosecond; Laser; Semiconductors

Indexed keywords

CUTTING; LASER ABLATION; SEMICONDUCTING SILICON; THIN FILMS;

FEMTOSECOND LASER PULSES;

LASER BEAM EFFECTS;

EID: 0037959928     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.486543     Document Type: Conference Paper

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