Processing of silicon by Nd:YAG-lasers with harmonics generation

ICALEO 2002 - 21st International Congress on Applications of Laser and Electro-Optics, Congress Proceedings

Volumn , Issue , 2002, Pages

  Udo, Klotzbach ^a   Michael, Panzner ^a   Jörg, Kasper ^a   Hendrik, Wust ^a   Thomas, Kuntze ^a   Franke, Volker ^a   Eckhard, Beyer ^a  

^a FRAUNHOFER INSTITUTE FOR MATERIAL AND BEAM TECHNOLOGY IWS   (Germany)

Author keywords

Laser ablation; Laser cutting; Laser processing; Microstructure processing; Silicon

Indexed keywords

ABLATION; CUTTING; HARMONIC ANALYSIS; LASER ABLATION; LASER PULSES; MICROSTRUCTURE; MOLTEN MATERIALS; OPTICAL PUMPING; PLASMA DIAGNOSTICS; SILICON; YTTRIUM ALUMINUM GARNET;

DIODE PUMPED ND: YAG; HARMONICS GENERATION; LASER CUTTING; LASER PROCESS; MICROSTRUCTURE PROCESSING; PLASMA TEMPERATURE; Q SWITCHED ND:YAG LASER; SILICON STRUCTURES;

NEODYMIUM LASERS;

EID: 85088734068     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.2351/1.5066188     Document Type: Conference Paper

References (7)

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