Comparison of hot cathode and cold cathode ionization gauges

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 9, Issue 3, 1991, Pages 1977-1985

  Peacock, R N ^a   Peacock, N T ^a   Hauschulz, D S ^a  

^a MKS Instruments   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84957232437     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.577439     Document Type: Article

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