Shadowing effects on the microstructure of obliquely deposited films

Journal of Applied Physics

Volumn 91, Issue 3, 2002, Pages 1963-1972

  Paritosh, ^a,b   Srolovitz, D J ^a  

^a Princeton University   (United States)

^b UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLOGRAPHIC TEXTURES; DEPOSITED FILMS; DEPOSITION ANGLE; FLUX DIVERGENCES; FRONT TRACKING; GRAIN SIZE; INCIDENT FLUX; PHYSICAL EFFECTS; POLYCRYSTALLINE; SHADOWING EFFECTS; SPATIAL DIMENSION;

PHYSICAL PROPERTIES;

PHYSICS;

EID: 33845396960     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1432125     Document Type: Article

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