Mechanical properties of DLC films prepared inside of micro-holes by pulse plasma CVD

Diamond and Related Materials

Volumn 13, Issue 11-12, 2004, Pages 1984-1988

  Yang, X D ^a   Saito, T ^b   Nakamura, Y ^b   Kondo, Y ^b   Ohtake, N ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b NGK INSULATORS LTD   (Japan)

Author keywords

Diamond like carbon; Micro coating; Micro extrusion die; Pulse plasma CVD

Indexed keywords

ACETYLENE; CHEMICAL VAPOR DEPOSITION; DIES; FRICTION; MECHANICAL PROPERTIES; PRESSURE EFFECTS; SILICON WAFERS; STAINLESS STEEL; VACUUM;

INNER WALL SURFACE; MICRO-COATING; MICRO-EXTRUSION DIE; PULSE PLASMA CVD;

DIAMOND LIKE CARBON FILMS;

EID: 7544239191     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2004.06.036     Document Type: Conference Paper

References (5)

1. K. Miyoshi, Surf. Coat Technol. 44 (1990) 799.
2. J. Robertson, Phys. Rev. Lett. 68 (1992) 220.
3. Al.H. Lettington, Carbon 36 (5-6) (1998) 555.
4. H.C. Tsai, D.B. Bogy, J. Vac. Sci. Technol., A, Vac. Surf. Films 5 (1987) 3287.
5. A. Matthews, S.S. Eskildsen, Diamond Relat Mater. 3 (1994) 902.