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Volumn 18, Issue 9, 2008, Pages 459-465

Large throw magnetic microactuator

Author keywords

Microactuators; Microbeams; Reluctance; RF switch; SU 8

Indexed keywords

MAGNETIC MATERIALS; MAGNETISM; MICROACTUATORS; PHOTORESISTS;

EID: 52949119516     PISSN: 09574158     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mechatronics.2008.05.012     Document Type: Article
Times cited : (14)

References (16)
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    • A bidirectional magnetic microactuator using electroplated permanent magnet arrays
    • Cho H.J., and Ahn C.H. A bidirectional magnetic microactuator using electroplated permanent magnet arrays. J Microelectromech Syst 11 1 (2002) 78-84
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    • Cho, H.J.1    Ahn, C.H.2
  • 5
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    • A universal electromagnetic microactuator using magnetic interconnection concepts
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    • Sadler, D.J.1    Liakapoulos, T.M.2    Ahn, C.H.3
  • 6
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    • Fullin E, Gobet, Tilmans HAC, Bergqvist J. A new basic technology for magnetic micro-actuators. In: Proceedings of the MEMS 98, 11th international workshop on micro electro mechanical systems; 1998. p. 143-7.
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    • Tilmans HAC, Fullin E, Ziad H, Van de Peer MDJ, Kesters J, Van Geffen E, et al. A fully-packaged electromagnetic microrelay. In: Proceedings of the MEMS 99, 12th IEEE international conference on micro electro mechanical systems; 1999. p. 25-30.
  • 8
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    • Guckel H., Fischer K, Stiers E. Closed loop control, large throw magnetic linear microactuator with 1000 μm structural height. In: Proceedings of the MEMS 98, 11th international workshop on micro electro mechanical systems; 1998. p. 414-8.
    • Guckel H., Fischer K, Stiers E. Closed loop control, large throw magnetic linear microactuator with 1000 μm structural height. In: Proceedings of the MEMS 98, 11th international workshop on micro electro mechanical systems; 1998. p. 414-8.
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    • 0030108637 scopus 로고    scopus 로고
    • Micro mechatronics and micro actuators
    • Ishihara H., Arai F., and Fukada T. Micro mechatronics and micro actuators. IEEE/ASME Trans Mech 1 1 (1996) 68-78
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  • 11
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    • A comparison of two micromachined inductors (bar- and meander-type) for fully integrated boost DC/DC power converters
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    • Dimitrakopoulos N, Miles RE, Corda J, Hartley AC. Large throw magnetic MEMS actuated RF switch. In: Proceedings of the IET seminar on MEMS sensors & actuators, London; 2006. p. 225-9.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.